JPH044526B2 - - Google Patents

Info

Publication number
JPH044526B2
JPH044526B2 JP57062729A JP6272982A JPH044526B2 JP H044526 B2 JPH044526 B2 JP H044526B2 JP 57062729 A JP57062729 A JP 57062729A JP 6272982 A JP6272982 A JP 6272982A JP H044526 B2 JPH044526 B2 JP H044526B2
Authority
JP
Japan
Prior art keywords
optical system
light
receiving surface
focusing optical
point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57062729A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58179303A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6272982A priority Critical patent/JPS58179303A/ja
Publication of JPS58179303A publication Critical patent/JPS58179303A/ja
Publication of JPH044526B2 publication Critical patent/JPH044526B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP6272982A 1982-04-14 1982-04-14 表面微小観察装置 Granted JPS58179303A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6272982A JPS58179303A (ja) 1982-04-14 1982-04-14 表面微小観察装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6272982A JPS58179303A (ja) 1982-04-14 1982-04-14 表面微小観察装置

Publications (2)

Publication Number Publication Date
JPS58179303A JPS58179303A (ja) 1983-10-20
JPH044526B2 true JPH044526B2 (en]) 1992-01-28

Family

ID=13208743

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6272982A Granted JPS58179303A (ja) 1982-04-14 1982-04-14 表面微小観察装置

Country Status (1)

Country Link
JP (1) JPS58179303A (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6148751A (ja) * 1984-08-17 1986-03-10 Sumitomo Metal Ind Ltd 表面欠陥検出方法
JP4232648B2 (ja) 2004-02-16 2009-03-04 コニカミノルタセンシング株式会社 反射光測定装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5319412B2 (en]) * 1973-07-31 1978-06-21
JPS5355983A (en) * 1976-10-31 1978-05-20 Konishiroku Photo Ind Co Ltd Automatic micro defect detector
JPS55101002A (en) * 1979-01-26 1980-08-01 Hitachi Ltd Inspecting method for mirror face body

Also Published As

Publication number Publication date
JPS58179303A (ja) 1983-10-20

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